Gas Detection System for Semiconductor Manufacturing Plants

The COSMOS "Extractive" Gas Detector Model PS-7 is a compact, lightweight, and advanced gas detection system for semiconductor manufacturing plants, designed to reduce running costs. It features a large, easy-to-read LCD, automatic sampling flow control for stable detection, and modular sensor units/gas flow paths for tool-free replacement. The system supports a wide range of semiconductor gases, including NF3 with an optional pyrolyzer and electrochemical sensor, and integrates with host systems via DeviceNet. Utilizing electrochemical, hot-wire semiconductor, or galvanic cell principles, its pre-calibrated sensor units eliminate on-site calibration, ensuring reliable and cost-effective operation. It provides 4-20mA DC analog output and alarm contacts, operating on 24V DC.